The Keithley S540 is a fully automated, wafer-level parametric test system that can perform all high voltage, low voltage, low current, and capacitance tests up to 3 kV in a single probe touch-down to maximize productivity and minimize cost of ownership. It is fully configurable from 12 to 48 pins.
• Up to 48 pins.
• Automatic three-terminal capacitance measurements such as Ciss, Coss, Crss up to 3 kV.
• Sub-pA current measurement capability.
• Perform all tests in a single probe touch-down.
• KTE v5.8 software for fast test development and execution.
• 9140 PCA combines high voltage and low current performance.
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